Microfluidic-Integrated, Ring-Resonator-Assisted Mach-Zehnder Interferometer (μFRA-MZI) as a Label-Free Nanophotonic Sensor.

The ring-assisted Mach-Zehnder interferometer (RA-MZI) has high sensitivity and fast optical response time, and it has been used as a label-free nanophotonic biosensor. Most RA-MZI-based biosensors, however, require chemical modification of the ring surface to immobilize biomolecules that can interact with target molecules for sensing. Here, we report a novel microfluidic-integrated RA-MZI (μFRA-MZI) where a microfluidic channel was fabricated right above the photonic ring resonator. μFRA-MZI allows for direct sample delivery to the RA-MZI without chemical modification of the ring surface and measures shifts in the resonance wavelength induced by the presence of target molecules, enabling label-free detection. In order to optimize the sensitivity of μFRA-MZI, seven devices were fabricated with varied design parameters, including the gap distance between the ring and the bus waveguide (Gring), the length of the multi-mode interferometer (LMMI), and the length of the directional coupler (LDC). Photonic characterization showed that the device with Gring = 1.2 μm, LMMI = 15.5 μm, and LDC = 13.5 μm exhibited the highest extinction ratio (ER) compared to the other six devices, consistent with the simulation-optimized design. Testing with NaCl solutions of varying concentrations yielded a bulk sensitivity of 11.48 nm/refractive index unit (RIU) and an ER of 0.41. With the potential to further improve the device's sensitivity and the ability to detect samples directly in flow without chemical modifications of the ring resonator, μFRA-MZI will provide a robust and effective approach for label-free biosensing.