Optimization of high-Q coupled nanobeam cavity for label-free sensing.

We numerically and experimentally investigated the lateral coupling between photonic crystal (PhC) nanobeam (NB) cavities, pursuing high sensitivity and figure of merit (FOM) label-free biosensor. We numerically carried out 3D finite-difference time-domain (3D-FDTD) and the finite element method (FEM) simulations. We showed that when two PhC NB cavities separated by a small gap are evanescently coupled, the variation in the gap width significantly changes the coupling efficiency between the two coupled NB cavities and the resulting resonant frequencies split. Experimentally, we fabricated laterally-coupled PhC NB cavities using (InGaAsP) layer on the InP substrate. For sensing, we showed that the laterally coupled PhC NB cavities sensor exhibits higher sensitivity than the single PhC NB cavity. The higher sensitivity of laterally coupled PhC NB cavities is due to the strong evanescent coupling between nearby PhC NB cavities, which depends on the gap width and it is attributed to the large confinement of the electromagnetic field in the gap (air or liquid). As a result of the lateral coupling, both even (symmetric) and odd (asymmetric) modes exist. We show that even modes are more sensitive than odd modes. In addition, higher-order modes exhibit higher sensitivity. Hence, we characterized and examined the fabricated PhC NB cavity as a label-free biosensor, and it exhibits high figure of merit due to its high Q-factor. This illustrates a potentially useful method for optical sensing at nanoscale.