Electrical Characteristics and pH Response of a Parylene-H Sensing Membrane in a Si-Nanonet Ion-Sensitive Field-Effect Transistor.

报道了采用超薄聚对二甲苯-H（parylene-H）作为栅极传感膜的硅纳米网离子敏感场效应晶体管（ISFET）的电学特性与pH响应。器件表现出优异直流特性：亚阈值摆幅85 mV/dec，开/关电流比约10^7，栅极漏电流约10^-10 A；界面态密度1.04×10^12 cm^-2，场效应迁移率510 cm^2 V^-1 s^-1。...